Vapor-phase Processing of Zeolitic Imidazolate Frameworks for Optical Sensor Integration

Promovendus/a: Jorid Smets

Promotor(en): Prof. dr. ir. Rob Ameloot, Prof. dr. Sammy Verbruggen

This thesis explores using vapor-phase thin film deposition methods to facilitate the integration of metal-organic frameworks (MOFs) into electronic devices. By developing all-vapor phase layer-by-layer deposition methods, a MOF-equivalent of atomic layer deposition has been achieved, a common technique in microfabrication. This method was further expanded by showing capabilities to allow area-selective deposition and control the degree of crystallographic orientation. Furthermore, the potential of these MOFs to function as reaction-mediated sensors for certain volatile compounds has been illustrated, and can be integrated with various transduction methods.