Unravelling the chemistry and kinetics of EUV-matter interactions in a model EUV photoresist material through photoemission spectroscopy

Category
Ph D Defense
Date
2026-11-26 13:30 - 16:00
Venue
Aula De Molen 00.07, Kasteelpark Arenberg 50, 3001 Heverlee - Kasteelpark Arenberg 50, 3001 Heverlee
Website
https://research.kuleuven.be/doctoraldefences/en/3E210223

Public PhD defence of Faegheh Sadat Sajjadian (Faculty of Science, KU Leuven), 26 November 2026, 13:30, aula De Molen 00.07, Kasteelpark Arenberg 50, 3001 Heverlee. Language: English.

Thesis: Unravelling the chemistry and kinetics of EUV-matter interactions in a model EUV photoresist material through photoemission spectroscopy.

 
 

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