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Metal-organic frameworks by vapor deposition processes

Ph D Defense
2021-04-13 17:00
ONLINE verdediging

Promovendus/a: Alexander John Cruz

Promotor(en): Prof. dr. ir. Rob Ameloot, Prof.dr.ir. Tom Hauffman, De heer Ivo Stassen

Nanotechnology has become a backbone of materials science innovation. The transition towards processing at such dimensions has led to high-performance materials development to meet growingly demanding commercial specifications. Metal-organic frameworks (MOFs), a subclass of porous solids comprised of metal-containing nodes connected by polytopic organic linkers, are gaining attention in the materials science arena. With many interesting properties such as high specific surface areas, periodicity, and chemical diversity, MOFs have earned their place in the research and development roadmaps of gas storage and transport, catalysis, molecular separations, and, recently, in electronic devices. MOF thin film fabrication methods compatible with production facilities are prerequisites to integrating these materials in electronic devices. In this work, the chemical vapor deposition (CVD) and molecular layer deposition (MLD) processes are employed to grow MOF layers entirely from the vapor phase. The spatial uniformity, coating quality, and precise thickness and composition control are some of the advantageous attributes of CVD and MLD. This dissertation tackles the chemistry lab-to-cleanroom approach: from mechanistic insights unraveled by a range of techniques, to process development and scale-up. Through the lab-to-fab transition, this work contributes to fully exploiting the colossal potential of MOFs in solid-state devices.

All Dates

  • 2021-04-13 17:00

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